Published November 1991 | Version v1
Journal article

Calculations of plasma sputtering including the effect of the surface floating potential

  • 1. Physics Dept., Univ. of Texas, El Paso, TX (United States)
  • 2. Center for Fusion Engineering, Univ. of Texas, Austin, TX (United States)
  • 3. Physics Dept., Univ. of Texas, Austin, TX (United States)

Description

The velocity distribution of plasma ions is altered significantly when the ions pass through the electrostatic, surface floating potential. The average energy of an ion can increase by more than a factor of three as a result of this potential and the effect on sputtering can be significant. In this paper, the effect of the surface floating potential on sputtering is calculated using a Monte Carlo code. This code incorporates a simulation of the velocity distribution of plasma ions incident on a surface with a floating potential. The effect of the surface floating potential is also included in a new plasma sputtering yield analytical model. Calculations of plasma sputtering with the new model are compared with Monte Carlo results. Expressed in terms of the ion plasma temperature and the surface floating potential, the new model should provide a fast and accurate means to calculate sputtering in fusion experiments. (orig.)

Additional details

Publishing Information

Journal Title
Journal of Nuclear Materials
Journal Volume
185
Journal Issue
1
Series
J. Nucl. Mater.
Journal Page Range
130-137
ISSN
0022-3115
CODEN
JNUMA

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
23029256
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
MATHEMATICAL MODELS; MONTE CARLO METHOD; PLASMA; SPUTTERING; SURFACE POTENTIAL
Descriptors DEC
CALCULATION METHODS; POTENTIALS