Vibration Isolation Study in Scanning Probe Microscope. Part II: High Frequency

The elastomeric properties of viton as an useful material for the high frequency vibration isolation in compact Scanning Probe Microscopes (SPM) were study. We obtained and analyzed some properties of this cylindrical material for different diameters and lengths and its performance on the isolation of the high-frequency noise. The SPM vibration isolation system studied in this work was built of several stacked metallic sheets, with three cylindrical viton being between them. Depending on the viton length used, it is possible to achieve certain resonant frequency as required for the SPM. We discuss the geometric effect of the elastomer viton for real cases on the vibration isolation systems. From these results, we are able to predict and optimize the response of this elastomer, and then ro reduce the high frequency noises. (Author) 10 refs