Published May 19, 1972
| Version v1
Patent
Semi conductor position sensitive detector
Description
no abstract available
Availability note (English)
Available from INPI, Paris.Additional details
Additional titles
- Original title (French)
- Detecteur a localisation a semi-conducteur
- Augmented title (English)
- implantation of ions
Publishing Information
- Imprint Pagination
- 10 p.
- IPC:
- Int. Cl. H01l15/00; H01l7/00.
- IPC
- Int. Cl. H01l15/00; H01l7/00.
- Patent number
- FR patent document 2184535/A/
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 6178510
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- ALUMINIUM; ANNEALING; CHARGED PARTICLE DETECTION; DOPED MATERIALS; FABRICATION; FILMS; ION IMPLANTATION; PHOSPHORUS IONS; POSITION SENSITIVE DETECTORS; SI SEMICONDUCTOR DETECTORS; SURFACE BARRIER DETECTORS
- Descriptors DEC
- CHARGED PARTICLES; ELEMENTS; HEAT TREATMENTS; IONS; MEASURING INSTRUMENTS; METALS; RADIATION DETECTION; RADIATION DETECTORS; SEMICONDUCTOR DETECTORS
Optional Information
- Notes
- Available from Institut National de la Propriete Industrielle, Paris (France).