Erosion and growth of solids stimulated by atom and ion beams

The subjects treated in this volume range from fundamental concepts of ballistic sputtering, and how this influences surface morphology evolution, through processes involving entrapment of incident species to mechanisms involved in the use of chemically reactive ion species. Further reviews outline the influence of energetic irradiation upon surface growth by atomic deposition, whilst others discuss technological applications to both areas of growth and erosion. These general, state-of-the-art discussions are supported by detailed accounts of relevant studies in the contributed papers. The proceedings should be of particular interest to those involved in the morphological, composition and structural modifications of solid surfaces in such diverse application areas as microelectronics, coating technology and fusion reactor development. (Auth.)