Published September 1988 | Version v1
Journal article

Transparent and conductive cadmium-tin oxide films deposited by atom beam sputtering

  • 1. Shinshu Univ., Nagano (Japan). Faculty of Engineering

Description

Transparent and conductive cadmium-tin oxide films with resistivities of 9 x 10-4 Ω cm and transmittance higher than 80 % over the visible range were prepared by atom beam sputtering. The structure of the deposited film was amorphous and its composition was highly deficient in CdO compared with Cd2SnO4. This CTO film was used as the window layer of a heterojunction solar cell. (author)

Additional details

Publishing Information

Journal Title
Japanese Journal of Applied Physics, Part 1
Journal Volume
27
Journal Issue
9
Series
Jpn. J. Appl. Phys., Part 1.
Journal Page Range
1630-1634
ISSN
0021-4922
CODEN
JAPND