Published June 1996 | Version v1
Journal article Metadata-only

Determination of the microbeam profile using deconvolution procedures

Creators

  • 1. Uniwersytet Jagiellonski, Cracow (Poland). Dept. of Physics
  • 2. Eindhoven University of Technology, Cyclotron Laboratory, P.O. Box 513, 5600 MB Eindhoven (Netherlands)

Description

The application of deconvolution procedures (Fourier deconvolution, iterative least-squares, maximum entropy) for the determination of a two-dimensional profile of a proton microprobe is described. It is found that the maximum-entropy method is the best suited deconvolution procedure for the restoration of the microprobe profile. The use of the method is feasible even for data with 40% uncertainty. Differences of the microprobe profiles calculated on the basis of X-ray and secondary electron distributions, are observed. The explanation of the phenomenon is proposed. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
113
Journal Issue
1-4
Journal Page Range
p. 391-395.
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
4. European conference on accelerators in applied research and technology (ECAART-4).
Dates
29 Aug - 2 Sep 1995.
Place
Zurich (Switzerland).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
27065995
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAM PROFILES; COMPARATIVE EVALUATIONS; ELECTRON EMISSION; FOURIER ANALYSIS; ION MICROPROBE ANALYSIS; ITERATIVE METHODS; LEAST SQUARE FIT; PROTON BEAMS; PROTON PROBES; SECONDARY EMISSION; SPATIAL DISTRIBUTION; TWO-DIMENSIONAL CALCULATIONS
Descriptors DEC
BEAMS; CALCULATION METHODS; CHEMICAL ANALYSIS; DISTRIBUTION; EMISSION; EVALUATION; MAXIMUM-LIKELIHOOD FIT; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NUCLEON BEAMS; NUMERICAL SOLUTION; PARTICLE BEAMS; PROBES