Published November 1, 2019 | Version v1
Journal article Metadata-only

Beam plasma discharge in technologies of materials for nanoelectronics

Creators

  • 1. V.A. Kotel'nikov Institute of Radio Engineering and Electronics of RAS Fryazino Branch, 1 Vvedensky Sq., Fryazino, 141120 (Russian Federation)

Description

The technologies developed at V.A. Kotelnikov Institute of Radio Engineering and Electronics of RAS for specific application in nanoelectronics that are not used in industry are reviewed. Physical problems that were been solved at their development are analyzed, and found solutions are represented. Tested applications are briefly described. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1393/1/012058

Additional details

Identifiers

DOI
10.1088/1742-6596/1393/1/012058;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1393
Journal Issue
1
Journal Page Range
[9 p.]
ISSN
1742-6596

Conference

Title
14. International Conference on Gas Discharge Plasmas and Their Applications
Dates
15-21 Sep 2019
Place
Tomsk (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53062978
Subject category
S36: MATERIALS SCIENCE; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAMS; MATERIALS; NANOELECTRONICS; PLASMA