Published November 1981
| Version v1
Journal article
Liquid metal alloy ion sources for B, Sb, and Si
- 1. Faculty of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
Description
B, Sb, and Si ion sources using liquid metal alloys have been fabricated and basic characteristics such as current--voltage relations, angular current intensity, energy distribution, and mass spectra have been measured. Singly charged B ions which amount to 33% of the total ions and have an angular current intensity of approx.40 μA/sr at a total energy spread (FWHM) of approx.20 eV were obtained using B--Ni--Pt alloys. Singly charged Si and Sb ions with an angular current intensity of approx.11 μA/sr and approx.1.4 μA/sr at an energy spread of approx.20 eV were obtained by using Si--Au and Sb--Pb--Au alloys, respectively. These ion sources could be operated for more than 10 h without any changes in mass spectra
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol.
- Journal Volume
- 19
- Journal Issue
- 4
- Series
- J. Vac. Sci. Technol.
- Journal Page Range
- 1182-1185
- ISSN
- 0022-5355
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 13666424
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ANTIMONY IONS; ARSENIC IONS; BORON ALLOYS; BORON IONS; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ENERGY SPECTRA; EUTECTICS; FABRICATION; HIGH VACUUM; ION BEAMS; ION SOURCES; LIQUID METALS; MASS SPECTRA; SILICON IONS
- Descriptors DEC
- ALLOYS; ATOMIC IONS; BEAMS; CHARGED PARTICLES; ELECTRICAL PROPERTIES; ELEMENTS; FLUIDS; IONS; LIQUIDS; METALS; PHYSICAL PROPERTIES; SPECTRA