Effects of the growth and the charge of carbon nanoparticles on direct current discharges

The formation of fine particles in plasmas from sputtered carbon atoms and the consequences of their growth and charging mechanisms on sputtering DC discharges were investigated. Experiments were performed with a constant discharge current so that the coupling between the plasma and two successive generations of nanoparticles were studied through the evolution of the discharge voltage, proportional to the ionization rate and also through the plasma emission. The consequences of the formation of negative ionic molecular precursors of the first particle generation were established as well as the effects of a redistribution of the nanoparticle cloud in the inter-electrode gap, not similar to the void effects usually observed in RF discharges. The cathode heating during the sputtering mechanism was also considered to explain partly the evolution of the discharge voltage and the plasma emission during the growth of the second nanoparticle generation.