Quantification of EFTEM elemental maps using ion beam techniques

In this paper the nanometric spatial resolution capabilities of energy filtered cross-sectional transmission electron microscopy (EFTEM) element mapping are complemented with the ability of elastic recoil detection analysis (ERDA) and Rutherford backscattering spectroscopy (RBS) to perform absolute and standardless composition analysis of light and heavy elements. The strength of this combination of techniques is examplified by means of several μm thick multielemental wear protection multilayer stacks of diamond-like carbon (DLC) and silicon compounds with individual sublayers of few ten nanometer thickness, which were analysed with respect to their composition. The result are quantitative high-resolution 2-dimensional distributions of different elements in the several μm thick film sandwiches