Studies on the luminescence of solid surfaces accompanied by ion implantation using an isotope separator

Luminescence caused by bombardment of ions Cl+, In+, InCl+ and InCl2+ on Al, graphite, phthalocyanine, Cu and Fe was studied under ion acceleration of 20 keV. This phenomenon is considered to be closely related to the processes occurring in ion implantation. The luminescence consists of atomic spectra originated from the target atoms and the projectile ions, and it also shows characteristic increase of base line intensity at the same regions of wave length for all the targets used in the experiments. It is found that all the components of the spectra in the same target are similar for various ions, while the intensity distribution of the spectra of optical emission in ion implantation differs from that in spark and arc sources. (author)