Published March 31, 2015 | Version v1
Journal article

Nanofilm thickness measurement by resonant frequencies

  • 1. Moscow State Region University (Russian Federation)

Description

We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies. (laser applications and other topics in quantum electronics)

Availability note (English)

Available from http://dx.doi.org/10.1070/QE2015v045n03ABEH015379

Additional details

Publishing Information

Journal Title
Quantum Electronics (Woodbury, N.Y.)
Journal Volume
45
Journal Issue
3
Journal Page Range
p. 270-274
ISSN
1063-7818

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47122368
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ABSORPTION; BOUNDARY CONDITIONS; ELECTRON COLLISIONS; INCIDENCE ANGLE; LASER RADIATION; METALS; MONOCHROMATIC RADIATION; REFLECTION; THICKNESS; THIN FILMS; TRANSMISSION
Descriptors DEC
COLLISIONS; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; RADIATIONS; SORPTION