Published March 31, 2015
| Version v1
Journal article
Nanofilm thickness measurement by resonant frequencies
Description
We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies. (laser applications and other topics in quantum electronics)
Availability note (English)
Available from http://dx.doi.org/10.1070/QE2015v045n03ABEH015379Additional details
Identifiers
Publishing Information
- Journal Title
- Quantum Electronics (Woodbury, N.Y.)
- Journal Volume
- 45
- Journal Issue
- 3
- Journal Page Range
- p. 270-274
- ISSN
- 1063-7818
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47122368
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ABSORPTION; BOUNDARY CONDITIONS; ELECTRON COLLISIONS; INCIDENCE ANGLE; LASER RADIATION; METALS; MONOCHROMATIC RADIATION; REFLECTION; THICKNESS; THIN FILMS; TRANSMISSION
- Descriptors DEC
- COLLISIONS; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; RADIATIONS; SORPTION