A high current, high energy RF-implanter

High ion energy and high beam current requirements needed for deep ion implantation into the surface of solids can be satisfied by rf accelerators rather than the commonly used static machines. An experimental set-up is discussed which consists of a bucket ion source, an electrostatic injection system, a radio frequency quadrupole (RFQ) accelerator, a spiral loaded cavity for energy variation, and a target chamber. (R.P.) 10 refs.; 3 figs.; 2 tabs