Published September 2001
| Version v1
Journal article
Erratum: 'Real-time feedback control of electron density in inductively coupled plasmas' [J. Vac. Sci. Technol. A 19, 750 (2001)]
Creators
- 1. Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan 30043 (China)
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1116/1.1387049;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 19
- Journal Issue
- 5
- Journal Page Range
- p. 2709
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35032037
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Numerical Data, No Abstract
- Descriptors DEI
- ELECTRON DENSITY; EXPERIMENTAL DATA; FEEDBACK; PLASMA; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA PRESSURE; REAL TIME SYSTEMS
- Descriptors DEC
- DATA; INFORMATION; NUMERICAL DATA
Optional Information
- Notes
- (c) 2001 American Vacuum Society.