Published 1988
| Version v1
Book
High current Freeman ion source with high ion ratio
Creators
- 1. Academia Sinica, Beijing, BJ (China). Inst. of Atomic Energy
Description
The working principle and structural feture of the Freeman ion source are briefly described in this paper. The problem on raising efficiencies of ionization and extraction has been resolved. The main experimental results are as follows: 11B+ = 5-6.5 mA. Ion ratio 11B+ /ΣM+ = 38.5 %, filament lifetime is more than 10 hours and gas consumption Q = 3.5 ml/min. This Freeman ion source is miniature in structure, convenient in maintenance and stable in operation. So it can be applied to the high current ion implanter. (author)
Additional details
Publishing Information
- Publisher
- RIKEN (Institute of Physical and Chemical Research).
- Imprint Place
- Wako, Saitama (Japan)
- Imprint Title
- Proceedings of the third Japan-China joint symposium on accelerators for nuclear science and their applications
- Imprint Pagination
- 245 p.
- Journal Page Range
- p. 202-203.
Conference
- Title
- 3. Japan-China joint symposium on accelerators for nuclear science and their applications.
- Dates
- 18-20 Nov 1987.
- Place
- Wako, Saitama (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 20017130
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM EXTRACTION; BORON 11 BEAMS; ELECTRIC DISCHARGES; ELECTRODES; FILAMENTS; ION IMPLANTATION; ION SOURCES; IONIZATION; MASS SPECTROSCOPY
- Descriptors DEC
- BEAMS; ION BEAMS; SPECTROSCOPY