Preparation of High JcYBCO Films on LAO by Spray Pyrolysis Process Using Nitrate Precursors

High Jc over 1 MA/cm2 YBCO film has been successfully prepared using nitrate precursors by spray pyrolysis method. Aerosol droplets generated using a concentric spray nozzle were directly sprayed on a LaAlO3 (100) single crystal substrate. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:1.35. The distance between nozzle and substrate was 15 cm. Deposition temperature was ranging from 750 to 800 degrees C. Deposition pressure was 100 Torr, and oxygen partial pressure was varied from 10 Torr to 50 Torr. The microstructure, phase formation, texture development and superconducting properties of deposited films were largely changed with oxygen partial pressure. Deposited films showed a texture with(001) planes parallel to substrate plane. High quality film was obtained when film was deposited at degrees C with an oxygen partial pressure of 30 Torr. The critical current density(Jc) of the YBCO film was 1.75 MA/cm2 at 77 K and self-field.