Investigation on structure and properties of arc-evaporated HfAlN hard coatings
- 1. PLANSEE Composite Materials GmbH, Siebenbuergerstrasse 23, D-86983 Lechbruck am See (Germany)
- 2. OC Oerlikon Balzers AG, Iramali 18, FL-9496 Balzers, Principality of Liechtenstein (Liechtenstein)
- 3. Christian Doppler Laboratory for Advanced Hard Coatings, Department of Physical Metallurgy and Materials Testing, Montanuniversitaet Leoben, Franz-Josef-Strasse 18, A-8700 Leoben (Austria)
Description
HfAlN hard coatings were synthesized by cathodic arc evaporation from Hf0.75Al0.25 targets at different bias voltages and N2 pressures. Structural investigations by x-ray diffraction (XRD) revealed the formation of a face-centered cubic (fcc) structure with a change in the preferred orientation depending on the energetic growth conditions. This change in the crystal structure did not significantly influence the mechanical properties, e.g., hardness, where values ranging from 24 to 26 GPa were measured. The obtained fcc phase is stable up to 1000 deg. C as no significant changes in the crystal structure could be observed after annealing in vacuum. Similar experiments in ambient air and subsequent analysis of the coatings by XRD and Raman spectroscopy revealed an onset temperature for oxidation in the range of 700-800 deg. C and the formation of monoclinic HfO2 as the dominating oxide phase. Ball-on-disk tests at different temperatures were performed in order to evaluate the tribological properties. The coefficient of friction ranged from 0.8 to 1.2 depending on the testing temperature while the best wear performance was obtained in the temperature range of 300-500 deg. C.
Additional details
Identifiers
- DOI
- 10.1116/1.3425804;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
- Journal Volume
- 28
- Journal Issue
- 4
- Journal Page Range
- p. 528-535
- ISSN
- 1553-1813
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44013685
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ALUMINIUM ALLOYS; ANNEALING; CRYSTAL GROWTH; EVAPORATION; FCC LATTICES; FRICTION; GRAIN ORIENTATION; HAFNIUM ALLOYS; HAFNIUM OXIDES; HARDNESS; MONOCLINIC LATTICES; OXIDATION; PRESSURE RANGE GIGA PA; RAMAN SPECTROSCOPY; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; VACUUM COATING; X-RAY DIFFRACTION
- Descriptors DEC
- ALLOYS; CHALCOGENIDES; CHEMICAL REACTIONS; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CUBIC LATTICES; DEPOSITION; DIFFRACTION; HAFNIUM COMPOUNDS; HEAT TREATMENTS; LASER SPECTROSCOPY; MECHANICAL PROPERTIES; MICROSTRUCTURE; ORIENTATION; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PRESSURE RANGE; REFRACTORY METAL COMPOUNDS; SCATTERING; SPECTROSCOPY; SURFACE COATING; TEMPERATURE RANGE; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2010 American Vacuum Society