Published July 2010 | Version v1
Journal article

Investigation on structure and properties of arc-evaporated HfAlN hard coatings

  • 1. PLANSEE Composite Materials GmbH, Siebenbuergerstrasse 23, D-86983 Lechbruck am See (Germany)
  • 2. OC Oerlikon Balzers AG, Iramali 18, FL-9496 Balzers, Principality of Liechtenstein (Liechtenstein)
  • 3. Christian Doppler Laboratory for Advanced Hard Coatings, Department of Physical Metallurgy and Materials Testing, Montanuniversitaet Leoben, Franz-Josef-Strasse 18, A-8700 Leoben (Austria)

Description

HfAlN hard coatings were synthesized by cathodic arc evaporation from Hf0.75Al0.25 targets at different bias voltages and N2 pressures. Structural investigations by x-ray diffraction (XRD) revealed the formation of a face-centered cubic (fcc) structure with a change in the preferred orientation depending on the energetic growth conditions. This change in the crystal structure did not significantly influence the mechanical properties, e.g., hardness, where values ranging from 24 to 26 GPa were measured. The obtained fcc phase is stable up to 1000 deg. C as no significant changes in the crystal structure could be observed after annealing in vacuum. Similar experiments in ambient air and subsequent analysis of the coatings by XRD and Raman spectroscopy revealed an onset temperature for oxidation in the range of 700-800 deg. C and the formation of monoclinic HfO2 as the dominating oxide phase. Ball-on-disk tests at different temperatures were performed in order to evaluate the tribological properties. The coefficient of friction ranged from 0.8 to 1.2 depending on the testing temperature while the best wear performance was obtained in the temperature range of 300-500 deg. C.

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Journal Volume
28
Journal Issue
4
Journal Page Range
p. 528-535
ISSN
1553-1813

Optional Information

Notes
(c) 2010 American Vacuum Society