The Radio-Frequency Capacitive Normal Glow Discharge in Transverse Magnetic Field

The problems of computer simulation of the two-dimensional structure of a radio-frequency capacitive (RFC) glow discharge are discussed. The diffusion-drift computational model of the discharge, burning in a quasi-stationary mode, was used to analyze the behavior of the RFC-discharge in a transverse magnetic field. The calculations were performed for a two-dimensional RFC-glow discharge at a pressure of 5-10 Torr and an emf of 520-1000 V power source with a frequency of 13.59 MHz. The magnetic field vector with induction B = 0.2 T is directed across the current column of the RFC-discharge. (paper)