Enhanced ferro-actuator with a porosity-controlled membrane using the sol-gel process and the HF etching method

In this paper, we propose a ferro-actuator using a porous polyvinylidene difluoride (PVDF) membrane. In detail, we fabricated the silica-embedded PVDF membrane using a sol-gel process with PVDF solution and tetraethyl orthosilicate (TEOS) solution, where the size of the silica was determined by the ratio of the PVDF and TEOS solutions. Using hydrofluoric acid (HF) etching, the silica were removed from the silica-embedded PVDF membrane, and porous PVDF membranes with different porosities were obtained. Finally, through absorption of a ferrofluid on the porous PVDF membrane, the proposed ferro-actuator using porous PVDF membranes with different porosities was fabricated. We executed the characterization and actuation test as follows. First, the silica size of the silica-embedded PVDF membrane and the pore size of the porous PVDF membrane were analyzed using scanning electron microscopy (SEM) imaging. Second, energy-dispersive x-ray spectroscopy analysis showed that the silica had clearly been removed from the silica-embedded PVDF membrane by HF etching. Third, through x-ray photoelectron spectroscopy and vibrating sample magnetometer (VSM) of the ferro-actuators, we found that more ferrofluids were absorbed by the porous PVDF membrane when the pore of the membrane was smaller and uniformly distributed. Finally, we executed tip displacement and a blocking force test of the proposed ferro-actuator using the porous PVDF membrane. Similar to the VSM result, the ferro-actuator that used a porous PVDF membrane with smaller pores exhibited better actuation performance. The ferro-actuator that used a porous PVDF membrane displayed a tip displacement that was about 7.2-fold better and a blocking force that was about 6.5-fold better than the ferro-actuator that used a pure PVDF membrane. Thus, we controlled the pore size of the porous PVDF membrane and enhanced the actuation performance of the ferro-actuator using a porous PVDF membrane. (technical note)