Published 1973 | Version v1
Journal article

Implantation of ions

Creators

  • 1. Institute of Nuclear Research, Warsaw (Poland)

Description

no abstract available

Additional details

Additional titles

Subtitle (English)
Part 1. Elements of theory of ranges
Original title (Polish)
Implantacja jonow
Original subtitle (Polish)
Czesc 1. Elementy teorii zasiegow.

Publishing Information

Journal Title
Nukleonika
Journal Volume
18
Series
Nukleonika.
Journal Page Range
335-350

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
6175961
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Is Lead record
Yes
Descriptors DEI
AMORPHOUS STATE; DATA; ENERGY LOSSES; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; RANGE; SILICON; STOPPING POWER
Descriptors DEC
ELEMENTS; ENERGY RANGE; INFORMATION; KEV RANGE; SEMIMETALS