Published 1973
| Version v1
Journal article
Implantation of ions
Description
no abstract available
Additional details
Additional titles
- Subtitle (English)
- Part 1. Elements of theory of ranges
- Original title (Polish)
- Implantacja jonow
- Original subtitle (Polish)
- Czesc 1. Elementy teorii zasiegow.
Publishing Information
- Journal Title
- Nukleonika
- Journal Volume
- 18
- Series
- Nukleonika.
- Journal Page Range
- 335-350
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 6175961
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Is Lead record
- Yes
- Descriptors DEI
- AMORPHOUS STATE; DATA; ENERGY LOSSES; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; RANGE; SILICON; STOPPING POWER
- Descriptors DEC
- ELEMENTS; ENERGY RANGE; INFORMATION; KEV RANGE; SEMIMETALS