Published 1987 | Version v1
Miscellaneous Metadata-only

Ion energies analysis in a radio frequency discharge

Creators

  • 1. Centro Tecnico Aeroespacial, Sao Jose dos Campos, SP (Brazil). Inst. Tecnologico de Aeronautica
  • 2. Oxford Univ. (UK). Dept. of Engineering

Description

The results of preliminary measurements of ion energies and plasma parameters in a radio frequency (PF) discharge, as used in material processing, are presented. (author)

Availability note (English)

Available from the Library of Comissao Nacional de Energia Nuclear, RJ, Brazil.

Abstract (Portuguese)

Apresentam-se os resultados das medidas preliminares das energias dos ions e dos parametros de plasma numa descarga de radio frequencia (RF) quando usado no processamento de material. (M.C.K.)

Additional details

Publishing Information

Imprint Title
Proceedings of the Energy Independence Conference: Fusion Energy and Plasma Physics
Imprint Pagination
892 p.
Journal Page Range
p. 206-217.

Conference

Title
Fusion Energy and Plasma Physics.
Acronym
Energy Independence Conference
Dates
17-21 Aug 1987.
Place
Rio de Janeiro, RJ (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
20050401
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
ARGON; PLASMA DIAGNOSTICS; PRESSURE DEPENDENCE; RF SYSTEMS; TEMPERATURE DEPENDENCE
Descriptors DEC
ELEMENTS; NONMETALS; RARE GASES