Published July 2006
| Version v1
Journal article
Improvement of materials surface properties by rf glow discharge treatment
Creators
- 1. Department of Electronic Engineering, Tsinghua University, Beijing 100084 (China)
Description
Materials surface properties were improved by the application of a rf glow discharge treatment for vacuum and electronic applications. The surface morphology was studied under different glow discharge treatments and it could be shown by experiments that the roughness of materials surface varied due to the glow discharge treating process and that a clean and smooth surface could be obtained after the treatment. The experimental results revealed that the outgassing rates for different gases decreased and the evacuating properties for the materials improved following the application of the glow discharge treatment
Additional details
Identifiers
- DOI
- 10.1116/1.2197507;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
- Journal Volume
- 24
- Journal Issue
- 4
- Journal Page Range
- p. 1568-1571
- ISSN
- 1553-1813
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37081541
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- DEGASSING; GLOW DISCHARGES; MORPHOLOGY; PLASMA; PROCESSING; ROUGHNESS; SURFACES
- Descriptors DEC
- ELECTRIC DISCHARGES; SURFACE PROPERTIES
Optional Information
- Notes
- (c) 2006 American Vacuum Society