Introduction on vacuum, surface analytical technique

The explanation on surface analytical technique, importance of processing techniques, definition of surface are in the introduction of this book. It also gives descriptions of this book. It also gives descriptions of vacuum technique with classification and definition, kinetic motion of gases, cause of occurrence of gas in the chamber and surface reaction of gases, vacuum pump, measurement of vacuum pressure, vacuum material and components, leak detectors vacuum system, LEED and RHEED, spectroscopic analysis techniques such as election spectroscopy and vibrational spectroscopy, ion spectroscopy and SSIMS.