Published January 2008 | Version v1
Journal article Metadata-only

Electrolytic anodizing of AIIIBV semiconductors implanted with rectifying metals

Creators

  • 1. Tekhnologicheskij Inst. Yuzhnogo Federal'nogo Univ., Taganrog (Russian Federation)
  • 2. OOO Al'fa, Rostov-na-Donu (Russian Federation)

Description

It is shown that ion implantation of GaAs and GaP semiconductors with Al, Zr, Ta, Hf, Gd and Nb leads to increase of electric strength and decrease of defectiveness of formed anode oxide films. Reactivity relative to hydroxide-ions is found to be decreased in tbe range Hf → Zr → Sc → Y → Ho → Gd → La → Al → Ta → Sb → Si → GaP → InP → Nb → Ga → InSb → In → GaAs → P → InAs → Hf4+ → Zr4+ → Y3+ → Ga3+ → Sc3+ → In3+ → Al3+ → As

Abstract (Russian)

Показано, что ионное легирование арсенида и фосфида галлия Al, Zr, Та, Нf, Gd и Nb позволяет повысить электрическую прочность и уменьшить дефектность формирующихся на поверхности полупроводников анодных оксидных пленок. Установлено, что реакционная способность по отношению к гидроксид-ионам уменьшается в ряду Hf → Zr → Sc → Y → Ho → Gd → La → Al → Ta → Sb → Si → GaP → InP → Nb → Ga → InSb → In → GaAs → P → InAs → Hf4+ → Zr4+ → Y3+ → Ga3+ → Sc3+ → In3+ → Al3+ → As

Additional details

Additional titles

Original title (Russian)
Электролитическое анодирование полупроводников типа А

Publishing Information

Journal Title
Fizika i Khimiya Obrabotki Materialov
Journal Issue
no.1
Journal Page Range
p. 55-59
ISSN
0015-3214
CODEN
FKOMAT

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
40088876
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ACTIVATION ENERGY; ANODIZATION; GADOLINIUM IONS; GALLIUM ARSENIDES; GALLIUM PHOSPHIDES; HAFNIUM IONS; HYDROXIDES; ION IMPLANTATION; NIOBIUM IONS; SEMICONDUCTOR MATERIALS; TANTALUM IONS; THERMODYNAMIC PROPERTIES; ZIRCONIUM IONS
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; CHARGED PARTICLES; CHEMICAL COATING; CORROSION PROTECTION; DEPOSITION; ELECTROCHEMICAL COATING; ELECTROLYSIS; ENERGY; GALLIUM COMPOUNDS; HYDROGEN COMPOUNDS; IONS; LYSIS; MATERIALS; OXYGEN COMPOUNDS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; SURFACE COATING

Optional Information

Notes
15 refs., 5 figs., 2 tabs.