X-ray and VUV reflectometry and metrology of plasma radiation sources

Comparison of various methods for quantitative (absolute) measurements of intensities in soft X-ray and VUV spectral ranges is considered. These methods include calibration of separate spectrometer elements, the use of absolutely calibrated spectrometers and formation of quasi-monochromatic with a large angle of divergence X-ray beams. Their use together with spectroscopy methods allows a providing complete plasma diagnostics: determination of plasma parameters and measuring of plasma radiation characteristics. (paper)