Published 2010 | Version v1
Miscellaneous Metadata-only

Study of surface of metal/silicon structures obtained by ion-assisted coating

Creators

  • 1. BGPU im. M. Tanka, Minsk (Belarus)
  • 2. BGTU, Minsk (Belarus)

Description

no abstract available

Part of:
Summaries of reports of 40th International conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Изучение поверхности структур металл/кремний, приготовленных ионно-ассистированным нанесением покрытий

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of 40th International conference on physics of interactions of charged particles with crystals
Imprint Pagination
226 p.
Journal Page Range
p. 178
Report number
INIS-RU--527

Conference

Title
40. International conference on physics of interaction of charged particles with crystals
Original Conference Title
XL mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
25-27 May 2010
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
43032900
Subject category
S36: MATERIALS SCIENCE; S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
ATOMIC FORCE MICROSCOPY; COBALT; DEPTH; DIAGRAMS; ENERGY BEAM DEPOSITION; EXPERIMENTAL DATA; MICROHARDNESS; MOLYBDENUM; NANOSTRUCTURES; PHYSICAL RADIATION EFFECTS; QUANTITATIVE CHEMICAL ANALYSIS; ROUGHNESS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION; TITANIUM; YOUNG MODULUS; ZIRCONIUM
Descriptors DEC
CHEMICAL ANALYSIS; DATA; DEPOSITION; DIMENSIONS; DISTRIBUTION; ELEMENTS; HARDNESS; INFORMATION; MECHANICAL PROPERTIES; METALS; MICROSCOPY; NUMERICAL DATA; RADIATION EFFECTS; REFRACTORY METALS; SEMIMETALS; SPECTROSCOPY; SURFACE COATING; SURFACE PROPERTIES; TRANSITION ELEMENTS

Optional Information

Notes
2 refs. Imprint:Tezisy dokladov 40. mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami