Published August 1976
| Version v1
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Versatile computational capability for ion-solid interactions
Creators
Description
A two step calculating technique is used to determine the distribution of implanted ions in solids. First, the instantaneous ion depth distribution is determined at any given energy as the ions slow to a stop in the target material. Second, at each energy in the slowing-down process, the rate at which the ions deposit energy is determined
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Additional details
Publishing Information
- Imprint Title
- Sandia technology
- Journal Page Range
- p. 12-15.
- Report number
- SAND--76-0264
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 8336601
- Subject category
- S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
- Descriptors DEI
- CHARGED-PARTICLE TRANSPORT; DEPTH DOSE DISTRIBUTIONS; ION IMPLANTATION; MOMENTS METHOD; MONTE CARLO METHOD; ONE-DIMENSIONAL CALCULATIONS; TRANSPORT THEORY
- Descriptors DEC
- RADIATION DOSE DISTRIBUTIONS; RADIATION TRANSPORT; SPATIAL DOSE DISTRIBUTIONS