Published 1959 | Version v1
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On the non-linearity, in relation to intensity, of high energy cathode erosion, and its variation according to temperature

Creators

  • 1. Commissariat a l'energie atomique et aux energies alternatives - CEA, Section des Reactions nucleaires a Basse energie, C. N. E., Saclay (France)

Description

A new theory of high energy cathode erosion has been produced subsequent to the observation of a variation from linearity of this phenomenon in relation to the intensity of incident ion currents. The theory leads to a supposition of the influence of the temperature of the target on the cathode erosion rate. This influence is sought and evidenced. Reprint of a paper published in Comptes rendus des seances de l'Academie des Sciences, t. 248, p. 1988-1990, sitting of 1 April 1959

Abstract (French)

Une theorie nouvelle de la pulverisation cathodique a haute energie a pu etre elaboree a la suite de l'observation d'un ecart a la linearite de ce phenomene par rapport a l'intensite des courants d'ions incidents. Cette theorie permet de prevoir une influence de la temperature de la cible sur le taux de pulverisation cathodique. Cette influence est recherchee et mise en evidence. Reproduction d'un article publie dans Comptes rendus des seances de l'Academie des Sciences, t. 248, p. 1988-1990, seance du 1er avril 1959

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Additional details

Additional titles

Original title (French)
Sur le caractere non lineaire en fonction de l'intensite de la pulverisation cathodique a haute energie et sa variation en fonction de la temperature

Identifiers

URL
http://www.iaea.org/inis/Contacts/;

Publishing Information

Imprint Pagination
6 p.
Report number
CEA-R--1184

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
49031263
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Descriptors DEI
CADMIUM IONS; CATHODE SPUTTERING; COPPER; CURRENT DENSITY; EROSION; ION BEAMS; SURFACE PROPERTIES; TARGETS; TEMPERATURE DEPENDENCE; TEMPERATURE GRADIENTS; VAPOR DEPOSITED COATINGS
Descriptors DEC
BEAMS; CHARGED PARTICLES; COATINGS; ELEMENTS; IONS; METALS; SPUTTERING; TRANSITION ELEMENTS

Optional Information

Notes
3 refs.; Available from the INIS Liaison Officer for France, see the 'INIS contacts' section of the INIS website for current contact and E-mail addresses: http://www.iaea.org/inis/Contacts/