Transport measurements on superconducting YBa2Cu3Ox-microstructures

Among the many methods for the preparation of high-Tc films of YBa2Cu3Ox laser ablation plays an important role and very early high-quality films were produced with this technique. In the last time this method has been developed to a rather sophisticated level and even the successful preparation of multilayer-structures was demonstrated recently. For applications of YBa2Cu3Ox in microelectronics patterning in the micron and submicron range must be accomplished. Structures of widths down to 0.6 μm were prepared by direct laser writing. For many experiments structures in the micrometer range are sufficient. Here we report on our first measurements of superconducting microbridges prepared by laser ablation through metal masks or by wet chemical etching with H3PO4. (orig.)