Scanning probe microscopy of diffraction gratings induced by laser radiation

Techniques of scanning tunneling microscopy and atomic force microscopy are used to study micron and submicron periodic structures formed by the pulsed interference optical field of a ruby laser on surfaces of implanted quartz glass and silicon. With an atomic force microscope (AFM), the subtle features of the interaction of light with a surface of the colored implanted glass are investigated. In particular, the influence of the nanometer size of absorbing centers on formation of the surface microrelief upon its local evaporation is studied, which is of interest for optical data storage. A scanning tunneling microscope (STM) was used to detect the formation of the microrelief upon laser evaporation and periodic changes in the surface conductivity caused by the pulsed interference laser annealing of amorphous silicon. With AFM and STM the two-dimensional submicron periodic gratings were found on a surface of the implanted silicon caused by superposition of several interference fields. 16 refs., 4 figs