Published February 2006
| Version v1
Journal article
Preliminary design of multi-function LIGA beamline
Creators
- 1. Chinese Academy of Sciences, Shanghai (China). Shanghai Inst. of Applied Physics
- 2. Chinese Academy of Sciences, Beijing (China). Inst. of High Energy Physics
Description
One design of multi-function LIGA beamline has been reported. In this design, two plane mirrors and a series of filters have been employed. One can choose the spectrum range of X-ray easily according to the exposure requirement by adjusting the grazing angle of mirrors and the thickness of filters. And the spot size in the horizontal direction is up to 120mm, which is large enough for exposing 5 inch silicon slice. The typical exposure time is about 1.2h, 1.8h, 0.5h, corresponding to PMMA thickness of 500 μm, 200 μm, 20 μm, respectively. (authors)
Additional details
Publishing Information
- Journal Title
- Nuclear Science and Techniques
- Journal Volume
- 17
- Journal Issue
- 1
- Journal Page Range
- p. 11-15
- ISSN
- 1001-8042
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 39070329
- Subject category
- S43: PARTICLE ACCELERATORS;
- Descriptors DEI
- BEAMS; DESIGN; IRRADIATION; MIRRORS; MOLDING; OPTICAL FILTERS; PMMA; RADIATION LENGTH; SILICON; SYNCHROTRON RADIATION; THICKNESS; X-RAY SPECTRA
- Descriptors DEC
- BREMSSTRAHLUNG; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; ESTERS; FABRICATION; FILTERS; LENGTH; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATIONS; SEMIMETALS; SPECTRA
Optional Information
- Notes
- 6 figs., 3 tabs., 4 refs.