Published 1987 | Version v1
Book Metadata-only

Development of compact synchrotron radiation ring for x-ray lithography

Creators

  • 1. Sumitomo Electric Industries, Ltd. Shimaya, Konohana, Osaka 554 (Japan)
  • 2. Electrotechnical Lab., Sakura, Niihari, Ibaraki 305 (Japan)

Description

The design parameters of a compact synchrotron radiation (SR) ring dedicated to industrial X-ray lithography are discussed. Further studies have been continued for making the SR ring and its injector smaller to complete a practical SR system. The Electrotechnical Laboratory and Sumitomo Electric Industries, Ltd. jointly completed a conventional compact test ring NIJI-1 (rainbow-1 in English) and succeeded in SR generation on February 1986. Presented here are useful results for the development of a compact SR system

Additional details

Publishing Information

Publisher
SPIE Society of Photo-Optical Instrumentation Engineers.
Imprint Place
Bellingham, WA (USA)
Imprint Title
Electron-beam, X-ray, and ion-beam lithographies VI
Imprint Pagination
vp.
Series
SPIE - Volume 773.
Journal Page Range
p. 257-263.

Conference

Title
Electron beam, X-ray, and ion beam lithographies VI.
Dates
5-6 Mar 1987.
Place
Santa Clara, CA (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
21028458
Subject category
S43: PARTICLE ACCELERATORS; S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Conference
Descriptors DEI
INDUSTRIAL RADIOGRAPHY; SPECIFICATIONS; STORAGE RINGS; SYNCHROTRON RADIATION; X RADIATION
Descriptors DEC
BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; MATERIALS TESTING; NONDESTRUCTIVE TESTING; RADIATIONS; TESTING

Optional Information

Secondary number(s)
CONF-8703284--.