Published 1989 | Version v1
Journal article

Oxygen-carbon interactions in silicon: photoluminescence defect spectrum at 1.06 eV emission

  • 1. Technische Hochschule Darmstadt (Germany, F.R.). Inst. fuer Technische Kernphysik
  • 2. Bell Labs., Murray Hill, NJ (USA)
  • 3. Wacker-Chemietronic Gesellschaft fuer Elektronik-Grundstoffe m.b.H., Burghausen (Germany, F.R.)

Description

We report a new luminescent defect with non-phonon emission at 1.0595 eV in silicon irradiated at high electron doses in the 1018 cm-2 range. Doping studies and 12C/13C and 16O/18O isotopic line shifts demonstrate that the defect forms upon oxygen-carbon interaction. Luminescence measurements at higher temperatures exhibit excited features consistent with an effective-mass like electron spectrum classifying the defect as a hole trap with hole binding energy of ≅79 meV. Stress data also hint to shallow bound electron and reveal low symmetry (triclinic) of the core defect. Similarities with the Ci-Oi 0.79 eV defect ('C line') are pointed out. (author) 22 refs., 6 figs., 1 tab

Additional details

Publishing Information

Journal Title
Materials Science Forum
Journal Volume
38-41
Series
Mater. Sci. Forum.
Journal Page Range
159-164
ISSN
0255-5476
CODEN
MSFOE

Conference

Title
15. International conference on defects in semiconductors (ICDS-15).
Dates
22-26 Aug 1988.
Place
Budapest (Hungary).