Published April 2005
| Version v1
Journal article
High-frequency micro-machined power inductors
- 1. NMRC, Lee Maltings, Prospect Row, Cork (Ireland)
Description
Power inductors have been fabricated on silicon substrates using low-temperature IC compatible processes. The electrical properties of these micro-inductors have been measured and discussed. A maximum quality factor of 6 at 4 MHz has been achieved with an inductance value of about 160 nH. The DC saturation currents of the non-gapped and gapped inductors are ∼500 and 700 mA, respectively. The relatively high Q factor and the load current characteristics allow these micro-machined inductors to be used in integrated power converters
Additional details
Identifiers
- DOI
- 10.1016/j.jmmm.2004.11.434;
- PII
- S0304-8853(04)01695-6;
Publishing Information
- Journal Title
- Journal of Magnetism and Magnetic Materials
- Journal Volume
- 290-291
- Journal Page Range
- p. 1347-1350
- ISSN
- 0304-8853
- CODEN
- JMMMDC
Conference
- Title
- Joint European magnetic symposia
- Acronym
- JEMS '04
- Dates
- 5-10 Sep 2004
- Place
- Dresden (Germany)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37026820
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- INDUCTANCE; MHZ RANGE 01-100; QUALITY FACTOR; SATURATION; SILICON; SOLENOIDS; SUBSTRATES
- Descriptors DEC
- DIMENSIONLESS NUMBERS; ELECTRIC COILS; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ELEMENTS; EQUIPMENT; FREQUENCY RANGE; MHZ RANGE; PHYSICAL PROPERTIES; SEMIMETALS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.