Published January 15, 1991
| Version v1
Journal article
Electrical transport and optical properties of zirconium nitride/aluminum nitride multilayers
- 1. Physics Department, General Motors Research Laboratories, Warren, Michigan 48090 (USA)
Description
We have synthesized zirconium nitride/aluminum nitride multilayered thin films with a reactive sputtering technique. The electrical transport and optical properties of these multilayers have been examined by resistivity, Hall effect, and near-normal incidence reflectance and transmittance measurements. We show the existence of a metal-to-insulator transition and strong increase of Hall coefficient at small wavelength of composition modulation. The optical response of the multilayers is systematically modified from the behavior of the individual constituents. The measured optical response is in qualitative agreement with a simple effective-medium theory
Additional details
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 69
- Journal Issue
- 2
- Series
- J. Appl. Phys.
- Journal Page Range
- 846-849
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 22042387
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM NITRIDES; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; HALL EFFECT; OPACITY; REFLECTION; SPUTTERING; THIN FILMS; ZIRCONIUM NITRIDES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; FILMS; NITRIDES; NITROGEN COMPOUNDS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; PNICTIDES; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS