Published June 5, 2012 | Version v1
Journal article Metadata-only

Effect of electron beam irradiation on PMMA films

Creators

  • 1. Indus Synchrotron Utilization Division, RRCAT, Indore (M.P.), 452013 (India)

Description

Polymethyl methacrylate (PMMA) is characterized for electron beam interactions in the resist layer in lithographic applications. PMMA thin films (free standing) were prepared by solvent casting method. These films were irradiated with 30keV electron beam at different doses. Structural and chemical properties of the films were studied by means of X-ray diffraction and Fourier transform infra-red (FTIR) spectroscopy The XRD results showed that the amorphization increases with electron beam irradiation dose. FTIR spectroscopic analysis reveals that electron beam irradiation promotes the scission of carbonyl group and depletes hydrogen and converts polymeric structure into hydrogen depleted carbon network.

Additional details

Identifiers

DOI
10.1063/1.4710140;

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1447
Journal Issue
1
Journal Page Range
p. 587-588
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
56. DAE solid state physics symposium 2011
Dates
19-23 Dec 2011
Place
Kattankulathur, Tamilnadu (India)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43094225
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ABSORPTION SPECTROSCOPY; AMORPHOUS STATE; CARBON; CARBONYLS; CHEMICAL PROPERTIES; ELECTRON BEAMS; FOURIER TRANSFORMATION; HYDROGEN; INFRARED SPECTRA; IRRADIATION; LAYERS; METHACRYLATES; PMMA; RADIATION DOSES; RADIATION EFFECTS; THIN FILMS; X-RAY DIFFRACTION
Descriptors DEC
BEAMS; CARBOXYLIC ACID SALTS; COHERENT SCATTERING; DIFFRACTION; DOSES; ELEMENTS; ESTERS; FILMS; INTEGRAL TRANSFORMATIONS; LEPTON BEAMS; NONMETALS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE BEAMS; POLYACRYLATES; POLYMERS; POLYVINYLS; SCATTERING; SPECTRA; SPECTROSCOPY; TRANSFORMATIONS

Optional Information

Notes
(c) 2012 American Institute of Physics