Published September 1993
| Version v1
Journal article
Fragmentation of metastable SiNOM-+ ions during ion bombardment
- 1. Uzbekian Academy of Sciences, Tashkent (Uzbekistan). Inst. of Electronics
Description
Short communication
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 44
- Journal Issue
- 9
- Journal Page Range
- p. 962-963.
- ISSN
- 0042-207X
- CODEN
- VACUAV
Conference
- Title
- 10. all-union conference on the interaction of ions with surfaces.
- Dates
- 3-6 Sep 1991.
- Place
- Zvenigorod (Russian Federation).
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 25001698
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ION BEAMS; ION-ATOM COLLISIONS; METASTABLE STATES; MOLECULAR IONS; OXYGEN IONS; SILICON; SILICON OXIDES; SPUTTERING
- Descriptors DEC
- ATOM COLLISIONS; BEAMS; CHALCOGENIDES; CHARGED PARTICLES; COLLISIONS; ELEMENTS; ENERGY LEVELS; EXCITED STATES; ION COLLISIONS; IONS; OXIDES; OXYGEN COMPOUNDS; SEMIMETALS; SILICON COMPOUNDS