Published November 1985
| Version v1
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Channeling contrast microscopy: a new technique for microanalysis of semiconductors
Creators
- 1. Melbourne Univ., Parkville (Australia). School of Physics
- 2. Royal Melbourne Inst. of Tech. (Australia)
Description
The technique of channeling contrast microscopy has been developed over the past few years for use with the Melbourne microprobe. It has been used for several profitable analyses of small-scale structures in semiconductor materials. This paper outlines the basic features of the technique and examples of its applications are given
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18021738.pdf
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Additional details
Publishing Information
- Imprint Title
- Fourth Australian conference on nuclear techniques of analysis: proceedings
- Imprint Pagination
- 279 p.
- Journal Page Range
- p. 220-224.
- Report number
- INIS-mf--10581
Conference
- Title
- 4. Australian conference on nuclear techniques of analysis.
- Dates
- 6-8 Nov 1985.
- Place
- Lucas Heights (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 18021738
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CHANNELING; ION BEAMS; ION MICROPROBE ANALYSIS; SEMICONDUCTOR MATERIALS; SILICON
- Descriptors DEC
- BEAMS; CHEMICAL ANALYSIS; ELEMENTS; MATERIALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; SEMIMETALS