Influence of The Sticking Effect on The Contact Resistance of a MEMS DC-Contact Switch

An improved model of the contact resistance in a MEMS DC-contact switch is presented and the sticking effect is included. In this model, the JKR theory is used to determine the sizes of contact spots and the electrical contact theory is used to estimate the contact resistance. The relationship between the contact resistance and the applied force has been investigated in different cases for a common Au-Au contact. The results suggest that the contact resistance is related to the applied force, the number of asperities, and the surface energies of contact materials. However, the height distribution of asperities has little influence on the contact resistance. The comparison between the improved model and the measurements that have been reported suggests the sticking contact model is more reasonable than the elastic contact model especially at low applied forces