Published May 1988
| Version v1
Journal article
Fabrication of ultrathin unsupported foils
Description
The fabrication of self-supporting unbacked foils of 200-A gold, 500-A chromium and titanium, and 1000-A aluminum oxide, titanium oxide, and zirconium oxide by electron beam evaporation is described. This technology is presented in sufficient detail to permit duplication and general procedures useful in predicting the minimum possible foil thickness are presented
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol., A
- Journal Volume
- 6
- Journal Issue
- 3
- Series
- J. Vac. Sci. Technol., A.
- Journal Page Range
- 1768-1769
- ISSN
- 0734-2101
- CODEN
- JVTAD
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 19075876
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM OXIDES; BORON; CHROMIUM; ELECTRON BEAMS; FABRICATION; FOILS; GOLD; TITANIUM; VACUUM COATING; VACUUM EVAPORATION; VAPOR DEPOSITED COATINGS; ZIRCONIUM OXIDES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BEAMS; CHALCOGENIDES; COATINGS; DEPOSITION; ELEMENTS; EVAPORATION; LEPTON BEAMS; METALS; OXIDES; OXYGEN COMPOUNDS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; SEMIMETALS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; ZIRCONIUM COMPOUNDS