An alternative approach for ζ-factor measurement using pure element nanoparticles

It is very challenging to measure the chemical composition of hetero nanostructures in a reliable and quantitative manner. Here, we propose a novel and straightforward approach that can be used to quantify energy dispersive X-ray spectra acquired in a transmission electron microscope. Our method is based on a combination of electron tomography and the so-called ζ-factor technique. We will demonstrate the reliability of our approach as well as its applicability by investigating Au-Ag and Au-Pt hetero nanostructures. Given its simplicity, we expect that the method could become a new standard in the field of chemical characterization using electron microscopy. - Highlights: • A new method to determine ζ-factors for EDXS quantification is proposed. • Pure element nanoparticles are used as standards in the determination of ζ-factors. • Electron tomography is used to measure volumes in determining the ζ-factors.