Published October 12, 1985 | Version v1
Journal article

Regularities of growth, chemical and phase composition and electrical properties in intrinsic oxide-semiconductor system

  • 1. Leningradskij Gosudarstvennyj Univ. (USSR)

Description

Methods of emissive spectral analysis were used to investigate layer growth of own oxide (CO)of 70-2500 A thickness on the surface of n-InSb, n-InAs and n-InP semiconductors. Volt-Faraday and Volt-Ampere charaiteristics of MDP-structures with top aluminium electrode were recorded. It is established that the highest rate of effective charge growth in oxide is inherent in the initial stage of CO layer growth, rate of charge increase differing for opposte semiconductor faces. Content of the second element (Sb, As, P) correlates with the value of effective charge in CO. It is found-that oxide film contains different structural modifications

Additional details

Additional titles

Original title (Russian)
Некоторые закономерности роста, элементно-фазового состава и элекрофизических свойств систем собственный оксид-полупроводник

Publishing Information

Journal Title
Pis'ma Zh. Tekh. Fiz.
Journal Volume
11
Journal Issue
9
Series
Pis'ma Zh. Tekh. Fiz.
Journal Page Range
1208-1213
CODEN
PZTFD

Optional Information

Notes
For English translation see the journal Soviet Technical Physics Letters (USA).