Characteristics of bipolar-pulse generator for intense pulsed heavy ion beam acceleration

Intense pulsed heavy ion beams are expected to be applied to the implantation technology for semiconductor materials. In the application it is very important to purify the ion beam. In order to improve the purity of an intense pulsed ion beams we have proposed a new type of pulsed ion beam accelerator named 'bipolar pulse accelerator (BPA)'. A prototype of the experimental system has been developed to perform proof of principle experiments of the accelerator. A bipolar pulse generator has been designed for the generation of the pulsed ion beam with the high purity via the bipolar pulse acceleration and the electrical characteristics of the generator were evaluated. The production of the bipolar pulse has been confirmed experimentally. (author)