Published December 1971
| Version v1
Journal article
Characterization of CVD molybdenum thin films
Creators
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1149/1.2407901;
Publishing Information
- Journal Title
- Journal of The Electrochemical Society
- Journal Volume
- 118
- Journal Issue
- 12
- Series
- J. Electrochem. Soc.
- Journal Page Range
- 2028
- ISSN
- 0013-4651
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 3021430
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON MICROSCOPY; FILMS; HIGH TEMPERATURE; MOLYBDENUM; SOLIDIFICATION; THICKNESS; TIME DEPENDENCE; VAPORS
- Descriptors DEC
- ELECTRICAL PROPERTIES; ELEMENTS; FLUIDS; GASES; METALS; MICROSCOPY; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; TRANSITION ELEMENTS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent