Published November 1, 1972
| Version v1
Patent
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Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process
Description
no abstract available
Availability note (English)
MF available from INIS under the Report Number.Files
4061905.pdf
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(380.1 kB)
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Additional details
Publishing Information
- Imprint Pagination
- 7 p.
- IPC:
- Int. Cl. C23C15/00; H01J37/04.
- IPC
- Int. Cl. C23C15/00; H01J37/04.
- Patent number
- GB patent document 1294697/B/
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 4061905
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S43: PARTICLE ACCELERATORS;
- Descriptors DEI
- ANODES; BEAM OPTICS; CATHODES; CYLINDERS; HIGH VACUUM; ION BEAMS; IONS; MAGNETIC FIELDS; PENNING ION SOURCES; PLASMA; SPUTTERING; SUBSTRATES; SURFACE COATING
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; DEPOSITION; ELECTRODES; ION SOURCES