Formation of oxides in molybdenum and tungsten surface layers under oxygen ion implantation

Using the method of X-ray electron spectroscopy the chemical and phase compositions of surface layers (of ∼ 3 nm thickness) of molybdenum and tungsten polycrystals after oxygen ion implantation are studied. It is found that implantation of high oxygen ion doses in the 1-5 keV energy range leads to formation of molybdenum and tungsten polycrystals of lower, intermediate and higher oxides. The total quantity of formed oxides, as well as the relation of oxide quantities of different composition depend on the implantation dose and energy