Published July 19, 1978
| Version v1
Patent
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Improvements in or relating to ion beam separators
Creators
Description
Improved ion beam separators are described that are particularly suitable for use in the uniform doping of target materials by ion implantation. Full constructional details are given. (UK)
Availability note (English)
MF available from INIS under the Report Number; Available from the Patent Office, 25 Southampton Buildings, London, WC2A 1AY.Files
10421842.pdf
Files
(477.4 kB)
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Additional details
Publishing Information
- Imprint Pagination
- 11 p.
- IPC:
- Int. Cl. H01J39/40.
- IPC
- Int. Cl. H01J39/40.
- Patent number
- GB patent document 1518282/A/
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 10421842
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- BEAM SEPARATORS; ION BEAMS; ION IMPLANTATION; SPECIFICATIONS; TARGETS
- Descriptors DEC
- BEAMS