Published March 1986 | Version v1
Journal article

Source of ions of solid and gaseous substances

  • 1. Tomskij Inst. Avtomatizirovannykh Sistem Upravleniya i Radioehlektroniki (USSR)

Description

Sourse of ions of solid and gaseous substances under normal conditions is described. A plasma electron source is utilized for obtaining vapours of solid working substance. The ion source operates in a continuous regime under the pressure of the working substance vapour of approximately 1 Pa at T <= 1300 K. Current of an ion beam approaches 10sup(-2) A. The surce can operate in the regime of an electron gun. Tests of the source in the regime of the electron gun revealed that at extracting voltage of 10 kV electron beam current exceeds 10 mA, at extracting voltage of 20 kV current of extracted electrons is equal to 23 mA. Working gas (air) flow rate makes up 2x10sup(-2) cm3/s under atmospheric pressure

Additional details

Additional titles

Original title (Russian)
Источник ионов твердых и газообразныкх веществ

Publishing Information

Journal Title
Prib. Tekh. Ehksp.
Journal Issue
no.2
Series
Prib. Tekh. Ehksp.
ISSN
0032-8162
CODEN
PRTEA

Optional Information

Notes
For English translation see the journal Instruments and Experimental Techniques (USA).