Effect of annealing on the structural and mechanical properties of Ba0.7Sr0.3TiO3 thin films
- 1. Institute of Mechanical and Electromechanical Engineering, National Formosa University, Yunlin 632, Taiwan (China)
- 2. Department of Mechanical Engineering, Kun Shan University, Tainan 710, Taiwan (China)
- 3. Department of Mechanical Engineering, WuFeng Institute of Technology, Chiayi 621, Taiwan (China)
- 4. Department of Electro-Optics Engineering, National Formosa University, Yunlin 632, Taiwan (China)
- 5. Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan (China)
Description
Mechanical properties and surface characterizations of Ba0.7Sr0.3TiO3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved by nanoindentation techniques. X-ray diffraction (XRD) and atomic force microscopy (AFM) were used to characterize the structure of Ba0.7Sr0.3TiO3 thin films. The X-ray diffraction results showed that Ba0.7Sr0.3TiO3 thin films exhibited a high (1 1 0)-orientation and presented a pure perovskite-type structure. The grain size and surface roughness increased as the annealing temperature increased. As well, the hardness and Young's modulus increased as the annealing temperature increased from 600 to 800 deg. C, with the best results obtained at 800 deg. C. In addition, contact stress-strain relationships and elastic recovery are also discussed
Additional details
Identifiers
- DOI
- 10.1016/j.msea.2006.03.069;
- PII
- S0921-5093(06)00349-2;
Publishing Information
- Journal Title
- Materials Science and Engineering. A, Structural Materials: Properties, Microstructure and Processing
- Journal Volume
- 426
- Journal Issue
- 1-2
- Journal Page Range
- p. 157-161
- ISSN
- 0921-5093
- CODEN
- MSAPE3
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38079333
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; ATOMIC FORCE MICROSCOPY; BARIUM OXIDES; DECOMPOSITION; GRAIN SIZE; HARDNESS; PEROVSKITE; ROUGHNESS; STRAINS; STRESSES; STRONTIUM OXIDES; SUBSTRATES; THIN FILMS; TITANIUM OXIDES; X-RAY DIFFRACTION; YOUNG MODULUS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; COHERENT SCATTERING; DIFFRACTION; FILMS; HEAT TREATMENTS; MECHANICAL PROPERTIES; MICROSCOPY; MICROSTRUCTURE; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PEROVSKITES; SCATTERING; SIZE; STRONTIUM COMPOUNDS; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.