Microhardness with depth sensing indentation. Instruments methods and applications

The study of applied surface layer or modified layers lead to the development of depth sensing indentation instruments in which measurements of penetration depth replaces optical measurements of surface impressions and sub-micron hardness may be determined. Indentation curves, depth-load, of elastoplastic materials give informations about plasticity and elasticity. After a description of the micro-indentation techniques we show few applications. Irradiation effects are measured in different materials like hafnium diboride, stainless steel or kapton. Hardness in oxide formed on metal study give informations. All these examples show that the nano-indentation is a powerful mean in the physical studies of materials because of a good statistic may be obtained and we have access to thin samples and to small phases. (author)